|
|
Expert in Silicon Wafer Cleaning, Etching, CVD
Available for your Consulting and Expert Witness Needs
|
|
|
|
Summary of Expertise:
|
Listed with other top experts in: |
|
A significant portion of Expert's career in semiconductor technology has involved chemical surface cleaning processes of semiconductor and oxide materials. Over a period of 30 years, he developed new processes for semiconductor wafer cleaning, specifically the RCA standard clean to purify silicon wafers, a key process still used in practically all IC fabs. He also developed associated megasonic techniques still used worldwide. Expert published numerous papers and a handbook on this subject, and has presented courses and seminars. Much of his consulting work has involved problem solving and optimization of wafer cleaning and associated technologies in production fabs.
|
|
|
Expert's R&D activities largely involved CVD (atmospheric, low-pressure, plasma-enhanced) as applied to the manufacturing of semiconductor devices. His special expertise is the CVD of dielectric films. He pioneered the preparation of silicon dioxide, silicate glasses, tantalum pentoxide, titanium dioxide, and transparent conductive films by thermal CVD and plasma-enhanced CVD based on vapor phase reactions of metal hydrides and organometallics, including tetraethyl orthosilicate (TEOS). He has been consulting and lecturing in CVD, directed research and development of CVD processes and reactor systems, presented courses and seminars in the subject, and published numerous papers and book chapters. Much of his consulting has involved CVD of films in the production of silicon integrated circuits.
|
|
|
A significant portion of Expert's career has been devoted to the research and development of deposition processes and the characterization of dielectric materials. He is best known for his original work on silicon dioxide, silicate glasses such as phosphosilicates and borophosphosilicates, silicon nitrides, and high dielectric-constant materials. He also developed methods for film analysis and the detection of structural defects.
|
|
|
Expert's outstanding contributions in this area are the invention, synthesis, characterization, and application of borophosphosilicate glass films for planarizing multilevel (ULSI) silicon integrated circuits. Other accomplishments include the application of phosphosilicate glasses, aluminum oxide, silicon dioxide (silica), and plasma-silicon nitride for the passivation and corrosion protection of metallized integrated circuits, and titanium dioxide films as antireflection coatings for silicon solar cells.
|
|
|
Expert has been active in the process development of many areas of etching and chemical-mechanical polishing (CMP) of electronic materials, including insulators, metals, silicon, and gallium arsenide. He published the first comprehensive book chapters on liquid chemical etching and its applications to semiconductor processing and other areas of advanced technology.
|
|
|
|
|
Show Secondary and Basic Areas of Expertise | Localities:
Expert may consult nationally and internationally, and is also local to the following cities: New York, New York;
Yonkers, New York;
Newark, New Jersey;
Jersey City, New Jersey;
Paterson, New Jersey;
Elizabeth, New Jersey;
Bridgeport, Connecticut;
Stamford, Connecticut;
Philadelphia, Pennsylvania;
and Allentown, Pennsylvania.
| | |
| Year |
|
Degree |
|
Subject |
|
Institution |
|
|
1955
|
|
BA
|
|
Chemistry
|
|
Rutgers University
|
|
|
1947
|
|
BA
|
|
Languages
|
|
Polyglot , Switzerland
|
|
|
1944
|
|
Diploma
|
|
Chemistry
|
|
Basel, Switzerland
|
|
| Years |
|
Employer |
|
Department |
|
Title |
|
|
1987 to
|
|
(Undisclosed)
|
|
|
|
President
|
|
|
1988 to 1992
|
|
Lam Research Corp.
|
|
|
|
Senior Scientist
|
|
|
1964 to 1982
|
|
RCA Laboratories
|
|
|
|
Fellow, Technical Staff
|
|
|
1959 to 1964
|
|
RCA
|
|
Solid State Division
|
|
Scientist
|
|
|
1958 to 1959
|
|
Nuclear Corp. of America
|
|
|
|
Chief Chemist and Safety Officer
|
|
Professional Appointments
He is a Fellow of the Electrochemical Society, past Chairman of the Dielectrics Division, and Advisor to the Solid State Divisions. He is an Emeritus member and CVD course lecturer of the American Vacuum Society.
|
Awards/Recognition
He has received the following awards: the T.D. Callinan Award of the Electrochemical Society's Dielectric Division, three RCA Laboratories Outstanding Achievement Awards; and a NASA Certificate of Recognition. He was elected 1991 Fellow of the Electrochemical Society. In 1997 Expert received the SEMI Award for North America in recognition of his contributions to semiconductor technology.
|
| Publications: |
 |
Publications and Patents Summary
Expert has lectured extensively, authored or co-authored over 140 scientific papers, written book chapters, and co-authored and co-edited the best-selling books "Thin Film Processes" (volume 2 published in 1991), and has been awarded 11 U.S. patents. His third book, "Handbook of Semiconductor Wafer Cleaning Technology," was published in 1993.
|
|
Selected Publications and Publishers
|
|
|
- Handbook of Semiconductor Wafer Cleaning Technology
|
|
|
- In: Thin Film Processes II
|
|
|
- Thin Film Processes II
|
|
|
- The Chemistry of the Semiconductor Industry
|
|
|
- Thin Film Processes
|
|
|
Recent Client Requests:
|
-
Silicon materials expert for consulting on evaluation of TEOS applications.
-
Expert in Power Electronics.
-
Expert in etching micro patterns in glass.
-
Expert in Semiconductor chemicals for consulting on materials business opportunities, and strategy development.
|
|
Click the green button above to contact
Expert for a free initial screening call regarding your expert consulting needs.
Expert is available for consulting to corporate, legal and government clients.
Remember, your initial screening call to speak with
Expert is free.
|
|
Expert Witness Experience Summary:
|
|
Expert has been active as an expert consultant in several patent litigations.
|
|
Recent Litigation Client Requests:
|
-
Expert in werner kern for patent litigationcase related to semiconductor wafer drying technology.
|
|
Click the green button above to contact
Expert for a free initial screening call regarding expert testimony,
litigation consulting and support, forensic services, or any related expert witness services.
A few litigation needs include product liability, personal injury, economic loss, intellectual property
(patent, trademark, trade secret, copyright), and insurance matters. Remember, your initial screening
call to speak with
Expert is free.
|
| Language Skills: |
|
| Foreign Language |
|
|
German
|
|
|
French
|
|
| Additional Skills and Services: |
|
Training/Seminars
Expert has extensive experience organizing seminars. He can provide advice on how to organize both technical and scientific courses in his areas of expertise.
|
|
Supplier and Vendor Location and Selection Expert has experience locating vendors of
chemical vapor deposition reactors and equipment, wafer cleaning and etching equipment, film deposition and materials analysis service companies. He has access to extensive reference files, personal contacts in industry and academia, books, journals, and trade magazines to aid in vendor location.
|
|
Education
